Figure 1: (a) Cross section TEM image of the HEA film showing a region where EDS line scan is performed. (b) EDS line scan concentration profiles of the elements in the HEA film. (c) Cross7 section scanning electron microscopy micrograph with EDS maps of the elemental composition on the HEA film

Figure 1: (a) Cross section TEM image of the HEA film showing a region where EDS line scan
is performed. (b) EDS line scan concentration profiles of the elements in the HEA film. (c) Cross7
section scanning electron microscopy micrograph with EDS maps of the elemental composition
on the HEA film