Fig. 5. Contact angles of water drops on (A) a PMMA polymer film surface, and (B) a smooth PBO-SAM coating film surfaceFig. 6. Simulation of Ni stamps and PBO-SAM/PMMA substrate in NIL process: (A) A nanoimprint system geometry, and (B) its grid plot.

Fig. 5. Contact angles of water drops on (A) a PMMA polymer film surface, and (B) a smooth PBO-SAM coating film surfaceFig. 6. Simulation of Ni stamps and PBO-SAM/PMMA substrate in NIL process: (A) A
nanoimprint system geometry, and (B) its grid plot.