Fig. 10. Defects formation predicted by (a) basic CHTC model with gravity effect; (b) VHTC model with heat transfer coefficient based on both gas pressure and coating thickness; and (c) improved model for two ingates. Color represents probability for defects (blue is the lowest and red highest).

Fig. 10. Defects formation predicted by (a) basic CHTC model with gravity effect; (b) VHTC model with heat transfer coefficient based on both gas pressure and
coating thickness; and (c) improved model for two ingates. Color represents probability for defects (blue is the lowest and red highest).